| Título | A generic MEMS sensor based on differential measurement |
|---|---|
| Autores | Quero, JM , BREY SÁNCHEZ, JOSÉ JAVIER |
| Publicación externa | Si |
| Medio | Ieee Industrial Electronics Society |
| Alcance | Proceedings Paper |
| Naturaleza | Científica |
| Fecha de publicacion | 01/01/2002 |
| ISI | 000181518100533 |
| DOI | 10.1109/IECON.2002.1182882 |
| Abstract | There are industrial applications where an accurate estimate of a radiation source position is needed. In this paper, a sensor based on differential measurement is presented. This sensor provides an accurate signal proportional to the incident angle of radiation. A large gain factor is possible with the proposed structure of the microsensor. As a result, a robust, low-cost device is achieved. The goodness of this approach makes it suitable for several new applications. |
| Miembros de la Universidad Loyola |