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A generic MEMS sensor based on differential measurement

Authors

Quero, JM , BREY SÁNCHEZ, JOSÉ JAVIER

External publication

Si

Means

Ieee Industrial Electronics Society

Scope

Proceedings Paper

Nature

Científica

JCR Quartile

SJR Quartile

Publication date

01/01/2002

ISI

000181518100533

Abstract

There are industrial applications where an accurate estimate of a radiation source position is needed. In this paper, a sensor based on differential measurement is presented. This sensor provides an accurate signal proportional to the incident angle of radiation. A large gain factor is possible with the proposed structure of the microsensor. As a result, a robust, low-cost device is achieved. The goodness of this approach makes it suitable for several new applications.