Zakharov D.I. , Horwat D. , ENDRINO ARMENTEROS, JOSÉ LUIS, Capon F. , Pierson J.F.
Si
IOP Conf. Ser. Mater. Sci. Eng.
Conference Paper
Científica
01/01/2009
000285529200022
2-s2.0-84893465022
Me-incorporated Zr0.84Y0.16 oxide thin films (Me: Cu or Pd) were synthesized by magnetron co-sputtering. The film structural evolution due to metal content increase was shown: Me-doped nanocrystalline yttria stabilized zirconia (YSZ); Me-doped amorphous oxide; metal nanoparticles embedded in the amorphous oxide matrix. Annealing for 2 h at 300°C in air promoted copper oxide formation and the segregation of very fine Pd particles. XANES analysis at the Cu-K edge showed that Cu is bonded to oxygen and Zr(Y) in Cu-doped amorphous oxide; this state was not affected by the thermal treatment. XANES and resistivity analyses indicated that the Cu nanoparticles likely have oxidized surfaces while the Pd-containing films showed only minor chemical changes after annealing. © 2009 IOP Publishing Ltd.
Amorphous oxides; Chemical change; Cu nanoparticles; Magnetron co-sputtering; Metal content; Metal nanoparticles; Nanocrystallines; Oxide thin films; Oxidized surfaces; Palladium nanoparticles; Pd particle; Structural and physical properties; Structural evolution; Thermal treatment; XANES; XANES analysis; Amorphous films; Annealing; Magnetrons; Materials science; Metal analysis; Nanoparticles; Oxide films; Oxygen; Palladium; X ray analysis; Yttria stabilized zirconia; Zirconia; Zirconium; Copper