Abad, Manuel D. , Veldhuis, Stephen C. , ENDRINO ARMENTEROS, JOSÉ LUIS, Beake, Ben D. , Garcia-Luis, Alberto , Brizuela, Marta , Sanchez-Lopez, Juan C.
Si
J. Vac. Sci. Technol. A Vac. Surf. Films
Article
Científica
2.322
0.828
01/03/2014
000335964200049
2-s2.0-84894445831
TiBC coatings with different phase compositions (nanocrystalline TiBxCy or TiB2 phases mixed or not with amorphous carbon, a-C) were prepared by magnetron sputtering. These coatings were comparatively studied in terms of phase stability after thermal annealing at 250, 500, 750, and 1000 degrees C in argon using Raman and x-ray absorption near-edge spectroscopy techniques. The main differences were observed at temperatures above 500 degrees C when oxidation processes occur and the mechanical properties deteriorate. At 1000 degrees C, the samples were fully oxidized forming a-C, TiO2, and B2O3 as final products. Higher hardness and reduced indentation modulus values and better tribological properties were observed at 750 degrees C for nanocomposite structures including amorphous carbon and ternary TiBxCy phases. This behavior is attributed to a protective effect associated with the a-C phase which is achieved by the encapsulation of the nanocrystals in the coating and the better hard/lubricant phase ratio associated with this type of coating. (C) 2014 American Vacuum Society.