ENDRINO ARMENTEROS, JOSÉ LUIS, Derflinger V.
Si
Surf. Coat. Technol.
Article
Científica
1.646
1.253
01/01/2005
000232327800218
2-s2.0-24644487732
Six high aluminum AlCr targets equally containing 5 at.% of Ti, V, Y, Nb, Mo and W respectively, were used to deposit alloyed aluminum chromium nitride thin films using the reactive cathodic arc deposition technique. Although the NaCl-type crystal structure was maintained for these transition metals, X-ray diffraction (XRD) studies revealed that the microstructure becomes partly amorphous in the case of the yttrium doped sample. Results from nano-indentation tests and annealing experiments reveal a notable influence of the alloying elements in the mechanical and oxidation resistance behavior of high aluminum chromium nitride coatings. Also, the potential for alloyed AlCrN coatings as tool coating materials is briefly discussed. © 2005 Elsevier B.V. All rights reserved.
Aluminum alloys; Annealing; Crystal structure; Deposition; Energy dispersive spectroscopy; Indentation; Mechanical properties; Nitrides; Oxidation resistance; Scanning electron microscopy; Thin films; X ray diffraction analysis; Aluminum chromium nitride coatings; Arc evaporation; Protective coatings; alloy