Título Comprehensive environmental testing of optical properties in thin films
Autores Heras, Irene , Guillen, Elena , Krause, Matthias , Wenisch, Robert , Escobar-Galindo, Ramon , ENDRINO ARMENTEROS, JOSÉ LUIS
Publicación externa Si
Alcance Proceedings Paper
Naturaleza Científica
Web https://www.scopus.com/inward/record.uri?eid=2-s2.0-84938919980&doi=10.1016%2fj.procir.2014.06.153&partnerID=40&md5=771e124c0e73b4df4d6b8c41076c7519
Fecha de publicacion 01/01/2014
ISI 345451600045
Scopus Id 2-s2.0-84938919980
DOI 10.1016/j.procir.2014.06.153
Abstract Environmental characterization of optical and structural properties of thin films continues to be a challenging task. To understand the failure mechanism in high temperature thin film applications, it is crucial to understand how material properties change with temperature. An accurate knowledge of the variation of the dielectric function of thin films and its relation to compositional and microstructural changes could help to prevent failures. This article presents an environmental in-situ characterization methodology that combines the study of the optical constants in an environmental chamber by spectroscopic ellipsometry, with compositional depth profile analysis using ion beam analysis techniques and a structure analysis by Raman spectroscopy. The main novelty of this methodology is that all analytical techniques are carried out sequentially in a multi-chamber cluster tool without sample exposure to undefined atmospheres. Carbon-titanium metal thin film had been studied following the described characterization methodology. (C) 2014 Elsevier B.V.
Palabras clave Thin films; optical constants; cluster tool; high temperature applications; thermal degradation; real time spectroscopic ellipsometry; ion beam analysis; Raman spectroscopy
Miembros de la Universidad Loyola

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