| Title |
A generic MEMS sensor based on differential measurement |
| Authors |
Quero, JM , BREY SÁNCHEZ, JOSÉ JAVIER |
| External publication |
Si |
| Means |
Ieee Industrial Electronics Society |
| Scope |
Proceedings Paper |
| Nature |
Científica |
| Publication date |
01/01/2002 |
| ISI |
000181518100533 |
| DOI |
10.1109/IECON.2002.1182882 |
| Abstract |
There are industrial applications where an accurate estimate of a radiation source position is needed. In this paper, a sensor based on differential measurement is presented. This sensor provides an accurate signal proportional to the incident angle of radiation. A large gain factor is possible with the proposed structure of the microsensor. As a result, a robust, low-cost device is achieved. The goodness of this approach makes it suitable for several new applications. |
| Universidad Loyola members |
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