| Title |
Aluminum incorporation in Ti1-x AlxN films studied by x-ray absorption near-edge structure |
| Authors |
Gago R. , Redondo-Cubero A. , ENDRINO ARMENTEROS, JOSÉ LUIS, Ji?nez I. , Shevchenko N. |
| External publication |
Si |
| Means |
JOURNAL OF APPLIED PHYSICS |
| Scope |
Article |
| Nature |
Científica |
| JCR Quartile |
1 |
| SJR Quartile |
1 |
| SJR Impact |
1.51 |
| Web |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649556971&doi=10.1063%2f1.3139296&partnerID=40&md5=4311888bb56e8d4cd70b3ddfa0bd9adb |
| Publication date |
01/01/2009 |
| ISI |
000267053200054 |
| Scopus Id |
2-s2.0-67649556971 |
| DOI |
10.1063/1.3139296 |
| Abstract |
The local bonding structure of titanium aluminum nitride (Ti1-x AlxN) films grown by dc magnetron cosputtering with different AlN molar fractions (x) has been studied by x-ray absorption near-edge structure (XANES) recorded in total electron yield mode. Grazing incidence x-ray diffraction (GIXRD) shows the formation of a ternary solid solution with cubic structure (c Ti1-x AlxN) that shrinks with the incorporation of Al and that, above a solubility limit of x~0.7, segregation of w-AlN and c-Ti1-x AlxN phases occurs. The Al incorporation in the cubic structure and lattice shrinkage can also be observed using XANES spectral features. However, contrary to GIXRD, direct evidence of w -AlN formation is not observed, suggesting a dominance and surface enrichment of cubic environments. For x>0.7, XANES shows the formation of Ti-Al bonds, which could be related to the segregation of w-AlN. This study shows the relevance of local-order information to assess the atomic structure of Ti 1-x AlxN solutions. © 2009 American Institute of Physics. |
| Keywords |
Al incorporation; AlN; Aluminum incorporation; Atomic structure; Cubic structure; DC magnetron co-sputtering; Grazing-incidence X-ray diffraction; Local bonding; Molar fractions; Solubility limits; Spectral feature; Surface enrichment; Titanium aluminum nitride; Total electron yield; X-ray absorption near-edge structure; XANES; Absorption; Alumina; Aluminum nitride; Nitrides; Segregation (metallography); Titanium; Titanium nitride; X ray absorption; X ray analysis; Aluminum |
| Universidad Loyola members |
|
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