← Back
Publicaciones

Enabling Low Temperature Aluminum Nitride ALD by Use of a Novel Hydrazine Source

Authors

ALVAREZ LORENZO, DANIEL, Spiegelman, Jeffrey J. , Andachi, Keisuke , Kondusamy, Aswin , Kim, Jiyoung , IEEE

External publication

No

Means

2019 Compound Semiconductor Week (csw)

Scope

Proceedings Paper

Nature

Científica

JCR Quartile

✗

SJR Quartile

✗

Publication date

01/01/2019

ISI

000539485600353

Universidad Loyola members