| Title | Structural and tribological characterization of Ti-In-N films deposited by magnetron sputter deposition |
|---|---|
| Authors | Nowicki M.A. , Krzanowski J.E. , ENDRINO ARMENTEROS, JOSÉ LUIS |
| External publication | Si |
| Means | J. Mater. Res. |
| Scope | Article |
| Nature | Científica |
| JCR Quartile | 2 |
| SJR Quartile | 1 |
| JCR Impact | 1.713 |
| SJR Impact | 0.92 |
| Web | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84857886361&doi=10.1557%2fjmr.2011.345&partnerID=40&md5=713759139f186b8a37a16ca0838de6d7 |
| Publication date | 01/01/2012 |
| ISI | 000304064500012 |
| Scopus Id | 2-s2.0-84857886361 |
| DOI | 10.1557/jmr.2011.345 |
| Abstract | TiN-indium composite films were deposited by simultaneous sputtering of titanium and indium in a mixed Argon/Nitrogen atmosphere and characterized for tribological applications. Film compositions showed a nonlinear behavior as a function of sputter gun power. For films deposited at -50 V bias, and containing less than 29 relative percent indium, the films had a face centered cubic structure, but at higher indium contents (63-82%) the structure was not consistent with either TiN or indium. At -150 V bias, the films had either the TiN structure, In-type structure, or a mixture of the two. Atomic force microscopy images showed the formation of semispherical drops on the surface of the samples deposited at -50 V bias voltage, whereas at -150 V bias voltage the samples exhibited a smooth coating surface with occasional ellipsoidal blisters. Nanoindentation test of the films shows low hardness (5-12 GPa), but tribological testing showed that frictional behavior can be improved by moderate heating before testing, suggesting indium segregation to the surface. Copyright © Materials Research Society 2011. |
| Keywords | Atomic force microscopies (AFM); Face centered cubic structure; Film composition; Frictional behavior; Indium content; Indium segregation; Low hardness; Magnetron sputter deposition; Nanoindentation tests; Nonlinear behavior; Smooth coatings; Tribological applications; Tribological characterization; Atomic force microscopy; Bias voltage; Composite films; Indium; Nanoindentation; Nitrides; Sputter deposition; Surface segregation; Surfaces; Tinning; Titanium; Tribology; Titanium nitride |
| Universidad Loyola members |