Title Structure and properties of silver-containing a-C(H) films deposited by plasma immersion ion implantation
Authors ENDRINO ARMENTEROS, JOSÉ LUIS, Escobar Galindo R. , Zhang H.-S. , Allen M. , Gago R. , Espinosa A. , Anders A.
External publication Si
Means Surf. Coat. Technol.
Scope Article
Nature Científica
JCR Quartile 1
SJR Quartile 1
JCR Impact 1.86000
SJR Impact 1.46300
Web https://www.scopus.com/inward/record.uri?eid=2-s2.0-40949114177&doi=10.1016%2fj.surfcoat.2008.01.011&partnerID=40&md5=00f2024a9175285d6d34957d8afe78b5
Publication date 01/01/2008
ISI 000255492700031
Scopus Id 2-s2.0-40949114177
DOI 10.1016/j.surfcoat.2008.01.011
Abstract In this study, we have grown silver-containing hydrogenated (a-C:H) and non-hydrogenated (a-C) amorphous carbon coatings by two plasma immersion ion implantation methods: I) chemical vapor deposition of methane combined with pulsed filtered cathodic arc deposition of silver, and II) by alternating arc pulses from graphite and silver in a dual cathodic arc plasma source. This unique "bias selective" feature of the deposition system allowed the deposition of silver with the substrates at ground and avoided the sputtering of the grown a-C film. Chemical composition of the samples was analyzed by acquiring their compositional depth-profiles using radio-frequency Glow Discharge Optical Emission Spectroscopy (rf-GDOES), while the microstructural properties were analyzed by X-ray absorption near edge spectroscopy (XANES) and Raman spectroscopy. In this contribution, we compare mechanical and biomedical properties by means of nanoindentation and cell viability tests, respectively, of a-C(H) films obtained by two different plasma immersion ion implantation techniques. © 2008 Elsevier B.V. All rights reserved.
Keywords Amorphous carbon; Ion implantation; Microstructure; Nanoindentation; Plasma enhanced chemical vapor deposition; Silver; Structure (composition); Cell viability; Plasma immersion ion implantation; Inor
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