Title Study of the effects of Si addition on the properties of hard nanocomposite thin films
Authors ENDRINO ARMENTEROS, JOSÉ LUIS, Palacin S. , Gutierrez A. , Aguirre M. , Schäfers F.
External publication Si
Means Mater Res Soc Symp Proc
Scope Conference Paper
Nature Científica
SJR Impact 0.22200
Web https://www.scopus.com/inward/record.uri?eid=2-s2.0-41549099707&doi=10.1557%2fproc-976-0976-ee03-18&partnerID=40&md5=34833ce3dfe8ddb99d8976cd7c51265f
Publication date 01/01/2006
Scopus Id 2-s2.0-41549099707
DOI 10.1557/proc-976-0976-ee03-18
Abstract In the present study, hard TiSiN coating compounds with different Si content have been deposited by the magnetron sputtering technique. X-ray diffraction (XRD) and X-ray absorption spectroscopy (XAS) have been employed to investigate the effects of Si addition on the composition, structure and phase development of the cubic NaCl-type structure. To get some insight on these changes, X-ray absorption spectra have been measured at the Ti and Si K-edges in fluorescence yield mode. The collected data showed that the interaction between Ti and Si was weak and the formation of a-Si3N4 can be assumed. Hardness measurements were also consistent with the formation of hard nanocomposite films. A maximum hardness of about 36 GPa was obtained for the sample with 11 at. % Si. © 2007 Materials Research Society.
Keywords Hardness testing; Magnetron sputtering; Nanocrystalline silicon; Phase interfaces; X ray absorption spectroscopy; X ray diffraction; Hardness measurements; Nanocomposite thin films; Phase development;
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